Design and Simulation of Micro-Cantilever Sensor with Higher Measurement Accuracy and Sensitivity

Micro-cantilevers (MCLs) are one of the basic micro-mechanical structures. They are fixed at one ends and the other can easily move. In these sensors, one surface of the MCL is coated with antibodies, proteins or other bio-receptors. In this paper, a surface stress ofwas applied to the top surface of the cantilevers. By fixing one of the dimensional parameters and altering the ratio of others, effect of the applied force on the resonance frequency of the MCL and the changes in sensitivity and Q factor are observed. Then, influences of different shaped holes on the sensitivity, Q factor, bandwidth and deflection are indicated. At the end,we proposed a new design of micro-cantilever that improved sensitivity, Q factor, bandwidth and deflection of it.

کلیدواژه ها:

micro-cantilever ، biosensor ، resonance frequency