Application of Thau Observer for Fault Detection of Micro Parallel Plate CapacitorSubjected to Nonlinear Electrostatic Force

سال انتشار: 1393
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 576

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شناسه ملی سند علمی:

JR_IJE-28-2_013

تاریخ نمایه سازی: 13 مرداد 1394

چکیده مقاله:

This paper investigates the fault detection of a micro parallel plate capacitor subjected tononlinearelectrostatic force. For this purpose, Thau observer, which has demonstrated good performance in faultdetection of nonlinear systems,as well asgoverning nonlinear dynamic equation of the capacitor,ispresented. Upper and lower threshold for fault detection have been obtained. The robustness of theobserver to noise, uncertainty as well as sensitivity to faults wasinvestigated. Finally, simulation resultsfor fault detection of the capacitor are obtained and the ability of the observer in the vicinity ofdynamic pull-in voltage has been checked

کلیدواژه ها:

Fault detectionThau observernonlinear forcemicro-parallel plate capacitornoise and uncertainty

نویسندگان

H Mobki

Department of Mechanical Engineering, University of Tabriz, Tabriz, Iran

M.H Sadeghi

Department of Mechanical Engineering, University of Tabriz, Tabriz, Iran

G Rezazadeh

Department of Mechanical Engineering, Urmia University, Urmia, Iran