Aviation Applications Of MEMS Pressure Sensors: Principles And Deployments

MEMS pressure sensors have become essential to modern aircraft, providing critical data for engine control, air-data systems, structural monitoring, and high-speed diagnostics. These sensors can be grouped by their transduction mechanism-piezoresistive, capacitive, optical, resonant, and piezoelectric-each offering a distinct balance of cost, accuracy, temperature stability, and dynamic response. This paper reviews the working principles and current performance of these five techniques and systematically maps them to documented aviation deployments, from Full-Authority Digital Engine Control and altimetry to wireless engine-health monitoring, amphibious hull load measurement, hypersonic boundary-layer diagnostics, and more. By linking sensor characteristics to operational requirements, the review highlights clear application niches and identifies emerging trends toward multi-parameter integration, harsh-environment materials, wireless interrogation, and prognostic health management. The resulting picture can serve as a reference for both sensor developers and aviation-system designers seeking to select or develop the most appropriate pressure-sensing technology.

کلیدواژه ها:

MEMS pressure sensors ، piezoresistive ، capacitive ، optical ، resonant ، piezoelectric ، aviation ، aerospace ، air data systems