Utilizing a Maskless Laser Lithography System in Photochemical Machining

Photochemical Machining is a non-traditional machining process of making fine mechanical parts. Lithography is the most challenging step in PCM. Development of maskless lithography techniques has been providing a solution for photomask cost and complexity issues. Moreover, it is a prime candidate for rapid prototyping and small scale manufacturing. Laser lithography is one of the maskless techniques with a promising future through development of powerful solids state lasers. A highly affordable direct laser lithography system is introduced. The system employs a fast and simple focusing system capable of reaching submicron feature sizes. Some early results are presented. Furthermore, laser power and exposure time effects are investigated for producing micro-channels with different widths.

کلیدواژه ها:

Laser ، Lithography ، Maskless ، Photochemical machining