A Fuzzy Inference System to Maintain Ultrasonic Cleaning Bath Efficiency for Semiconductor Applications

In this paper, fuzzy control concept is adopted to straightforwardly construct acontroller to maintain ultrasonic cleaning bath efficiency. The aforementioned schememakes use of bath turbidity and temperature to maintain the generated power whichis delivered to the ultrasonic generating element. The single output power surfacewas generated by implementing Mamdani fuzzy inference system and the results werediscussed.

کلیدواژه ها:

Fuzzy Controller ، Ultrasonic Cleaning ، Fuzzy Inference System (FIS) ، Smart Systems ، Artificial Intelligence (AI)