Simulation and Derivation of deflection Equation for suspended diaphragm for MEMS Application Uaing Kirshohff-Love Theory

سال انتشار: 1397
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 255

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شناسه ملی سند علمی:

JR_JIAE-15-4_003

تاریخ نمایه سازی: 6 اسفند 1398

چکیده مقاله:

In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understanding its behavior and calculating its other practical parameters both in dynamic and static fields. Here, using the thin sheet Kirchhoff-Law theory these issues are addressed. The results of analysis and simulation have been compared with each other, representing the 1% accuracy of the obtained statements, suggesting accuracy of the obtained results. The results show that the suspended diaphragm has greater deflection compared to simple flat diaphragm, which is considered important in sensors and micro electromechanical devices

نویسندگان

Mohammad Reza Mahlooji

M.S student, Faculty of New Sciences & Technologies, University of Tehran, Tehran, Iran

Javad Koohsorkhi

Assistant Professor, Advanced Micro and Nano Devices Lab., Faculty of New Sciences & Technologies,University of Tehran, Tehran, Iran