Micro-Microscope Microcrystal Sensor Design for Chemical Detection in Zagros Area Tunnel Drilling

In this paper, an example of a rectangular microtreatment of a head is shown under torsional conditions, in which length, width, thickness, height and distance between the piezoelectric layer under the influence of the frequency of frequency amplification and frequency sensitivity are investigated and discussed. Is. In this study, for the first time, the microtower vibrational motion analysis in the role of the sensor of gases in the excavation of tunnels is investigated and the effect of absorption of these gases on the microtight vibrational behavior is studied. To analyze this vibrating microcircuit, considering that it can be a fluid and air environment, the fluid environment is continuous and much larger than the microtreatment dimension, and the fluid is a Newtonian type with constant viscosity and an incompressible flow. Given the prevailing assumptions about this type of fluid, the equation of motion of a microtower is torsionally vibrational in a viscous fluid assuming Euler-Bernoulli. Before obtaining the quality coefficient of a torn vibrating microtreatment in a viscous fluid, first, the quality coefficient of a vibrational system under the mean burst is obtained according to the resonance frequency equation (by solving the equation of motion), and to obtain the coefficient of quality, first, The kinetic energy, potential energy, total energy and energy dissipation per cycle in the stable state system should be calculated, as well as the frequency spectrum obtained by the torsional deformation in terms of natural frequency.

کلیدواژه ها:

Micro-electromechanical systems ، micro-sensors ، vibration ، torsion ، piezoelectric ، coefficient ، frequency sensitivity