Fabrication of two dimensional grating based on nanoporous alumina arrays using hard and mild anodization techniques

Based on anodization technique a two dimensional diffraction grating was fabricated on aluminum plate. Using hard anodization technique, transmitive grating with interpores ranging from 260 to 320 nm was prepared. In order to prepare the porous alumina arrays, a one step hard anodization using 0.3 M oxalic acid with 150 and 160V, anodization voltage were employed. Domain size of hexagonal ordered arrays were observed with over tens μm2 area. Optical properties of gratings were investigated using visible light sources thereby the structure details of gratings were determined.

کلیدواژه ها:

porous aluminum oxide ، hard anodization ، mild anodization ، transmitive diffraction grating