Estimation of the Pull in Voltage and the Effect of the Various Number and Dimension of Meanders in Serpentine Spring on it with Numerical Simulation

This paper presents the couple filed simulation with ANSYS software on one of the developed capacitive RF MEMS switches with serpentine spring to estimate the pull in voltage [1]. The study permits to see how serpentine spring with different number and dimension of meanders can be affected on the pull in voltage. With this study we could decrease the pull in voltage from 15 volt to 6.2 volt.

کلیدواژه ها:

Serpentine spring ، Capacitive RF MEMS Switch ، Pull in Voltage