Diagnostic of plasma discharge parameters in helium filled dielectric barrier discharge

This paper reports the plasma discharge analysis of a dielectric barrier discharge (DBD) source. Helium is used as aworking gas. The analysis is performed at fixed working pressure and operating frequency. The investigations arecarried out using sinusoidal supply for the generation of discharges where two current pulses have been observedwith different polarities in one period. A homogeneous type of discharge has been observed for different operatingconditions in this DBD source. Since in situ diagnostics are not possible due to the small geometries in the usedDBD source, the electrical measurements and spectroscopic analysis of the discharge have been performed toanalyse the plasma discharge. The electrical analysis has been carried out using equivalent electrical circuit model.The plasma density and temperature within the discharge have been estimated using line ratio technique of theobserved visible neutral helium lines. The estimated electron plasma density is found to be in close proximity withthe plasma simulation code ‘OOPIC Pro’.

کلیدواژه ها:

Dielectric barrier discharge ، OOPIC pro ، Line ratio ، Particle in cell