Comprehensive Electromechanical Analysis of MEMS Variable Gap Capacitors
سال انتشار: 1386
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 563
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شناسه ملی سند علمی:
JR_JIAE-4-2_001
تاریخ نمایه سازی: 13 تیر 1396
چکیده مقاله:
This paper presents a comprehensive case study on electro-mechanical analysis of MEMS1 variable capacitors. Using the fundamental mechanical and electrical equations, static and dynamic behaviors of the device are studied. The analysis is done for three different modes, namely: dc (static mode), small signal ac and large signal regime. A complete set of equations defining dynamic behavior of the MEMS, and an ac small signal equivalent circuit are presented. The mathematical models are defined and examined by the Matlab Simulink and a complete set of simulation results is reported for various cases separately. The results of this study would be useful in design and analysis of the MEMS based circuits which have some kind of mechanical dynamic action. Some examples of such devices may include VCO2s, frequency modulators, tunable filters and parametric effect circuits.
کلیدواژه ها:
نویسندگان
Hooman Nabovati
Department of Electrical Engineering, Sadjad University, Mashhad, Iran
Khalil Mafinezhad
Department of Electrical Engineering, Ferdowsi University, Mashhad, Iran
Aydin Nabovati
Department of Mechanical Engineering, University of New Brunswick, Fredericton, Canada