Performance Analysis of Microsystems in the Presence of Pull-In Instability

Objective of the current work is to represent performance analysis of microsystems in the presence of pullin instability phenomenon. To this end, the Euler-Bernoullibeam theory and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM)is employed to solve the nonlinear partial differentialgoverning equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeezefilmdamping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-ininstability of poly-silicon micro-beam is strongly sizedependent.It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.

کلیدواژه ها:

Micro-beam ، Pull-in instability ، Reynolds equation ، Dimensionless variables