Optical properties of diamond-like carbon nano-film deposited by RF- PECVD

Diamond-like carbon (DLC) nano-films were deposited on glass substrates by RadioFrequency Plasma Enhanced Chemical Vapor Deposition method (RF-PECVD) usingmethane (CH4) and hydrogen (H2) gases. X-ray diffraction (XRD) and Raman spectroscopywere used to characterize the structure of the DLC films. The optical properties of theDLC films were investigated by UV-VIS-NIR spectrophotometer and ellipsometer. Inamorphous carbons ID/IG is a measure of the size of the sp2 phase organized in rings. IfID/IG is negligible, then the sp2 phase is mainly organized in chains, or, even if rings arepresent, the  bonds are not fully delocalized on the rings. XRD showed that the DLCfilm included amorphous structure and the raman spectroscopy showed that the ratio ofthe D and G peaks (ID/IG) is negligible (0.87). this was confirmed by XRD results. Theoptical results indicated that refractive index and band gap of the DLC thin film were 1.9and 1.45 eV, respectively.

کلیدواژه ها:

DLC ، PECVD ، Nano-film ، Optical properties