Texture study of Ag thin films by ODF analysis using X-ray diffraction

This work presents orientation distribution function (ODF) calculations of the texture development of Ag thinfilm with different thicknesses grown on Si (100) substrates by DC magnetron sputtering using XRD measurements.Crystal structure of Silver thin films measured using θ-2θ XRD scans in Standard Bragg- Brentano geometry. ODFs weremeasured by X'Pert Texture software. The effect of temperature on the film's texture also has been investigated usingHTK-XRD analysis up to 6000C. It has found that applying high temperature procedure improved texture of Ag thinfilms with different thicknesses but the degree of crystallography development depends on the film thickness. Also it hasbeen distinguished that post annealed Ag thin films preferred strongly {111} orientations.

کلیدواژه ها:

Ag thin films ، Texture ، XRD measurements ، ODF ، Preferred Orientation