Effect of Temperature and Gas Flux on the Mechanical Behavior of TiC Coating byPulsed DC Plasma Enhanced Chemical Vapor Deposition

There are many factors in coatings process which are effective in changing coatings characteristic such asvoltages, duty cycle, pressure, temperatures and gas flux. In this paper, in plasma enhanced chemicalvapor deposition (PECVD) technique, temperature and gas flux are two important variants which affectthe coatings structure and mechanical properties. All TiC coating deposited on a hot work tool steel (H13)had a thickness of 2-3 micrometer. The investigation of TiC coatings composition and structure were donewith the grazing incidence XRD, the FTIR (Fourier Transformation Infrared Spectroscopy) and the FieldEmission Scanning Electron Microscopy (FE-SEM). The mechanical properties of the coatings, such ashardness, wear resistance and surface roughness were studied with Vickers hardness indentation; pin ondisk wear tests and atomic force microscopy, respectively. The best mechanical properties such as a highhardness (3100 VHN), wear resistance and fracture toughness (11.3MPa. m1/2) and low surface roughness(18 nm) were related to the coating which was deposited in 450°C.

کلیدواژه ها:

Titanium CarbidePECVDGas FluxTemperatureWear