Design, Simulation and Analytical Modeling of a Novel MEMS-Based Biosensor for Rapid Tuberculosis Detection

Early detection of Tuberculosis (TB) is so essential in the treatment procedure. There are many diagnosis methods like skin test or smear test but these methods are time and cost consuming. This paper focuses on MEMS-based biosensors for detection. In this paper, a simple, fast and cost-effective method using MEMS cantilever is used for TB detection. The cantilever is supposed to be coated with the TB antibody (ESAT-۶). The cantilever and supported springs and also the stress concentrating region (SCR) are designed to achieve maximum deflection and maximum frequency shift. Different materials have been evaluated in different shapes of the cantilever and also the proposed structures. The proposed structures show better sensitivity, resolution, high deflection, and significant frequency shift based on simulation results. The simulation results are also being validated by calculations. COMSOL Multiphysics and MATLAB are used for finite element simulations and calculations, respectively.

کلیدواژه ها:

COMSOL ، MATLAB ، SCR ، PDMS ، design and displacement