Finite Element Comparative Analysis of MoS۲-Integrated MEMS Microcantilever Biosensors for HER۲ Breast Cancer Biomarker Detection

HER۲ overexpression is considered one of the important molecular indicators in breast cancer diagnosis and treatment planning. The development of miniaturized and label-free sensing platforms capable of detecting cancer-related biomarkers has attracted considerable attention due to their potential for rapid and sensitive analysis. MEMS-based microcantilever biosensors provide a promising approach by converting biomolecular interactions into measurable mechanical responses. In this work, a multi-material MEMS microcantilever biosensor is designed and numerically analyzed for HER۲ biomarker detection. A rectangular fixed-free microcantilever with dimensions of ۳۰۰ × ۵۰ × ۰.۵ μm³ is investigated using finite element analysis. Five material configurations, including Si, PDMS, Au, Si۳N۴, and Si/MoS۲ hybrid structures, are evaluated under identical geometrical and biological loading conditions. The biomolecular interaction between HER۲ antigen and antibody is converted into an equivalent mechanical load. For a target concentration of ۱۵ ng/mL, the generated molecular force is represented as a uniform surface pressure of ۱.۳۵ × ۱۰-۵ Pa applied to the sensing surface. The effects of material selection on the static deformation, stress distribution, resonance frequency, and displacement sensitivity are investigated using COMSOL Multiphysics. The simulation results reveal that the mechanical response of MEMS biosensors is strongly affected by the selected structural material. The Si/MoS۲ hybrid configuration provides a balance between mechanical stability and enhanced sensing capability due to the integration of a conventional MEMS substrate with a two-dimensional material layer. The obtained results demonstrate the potential of MoS۲-assisted MEMS microcantilevers as an efficient platform for mechanical detection of breast cancer biomarkers.

کلیدواژه ها:

MEMS biosensor ، microcantilever ، HER۲ ، breast cancer detection ، MoS۲ ، finite element analysis