A Comprehensive Review of MEMS Pressure Sensors: Principles, Technologies, and Emerging Applications

This paper provides a comprehensive investigation of Microelectromechanical Systems (MEMS) pressure sensors from theoretical, technical, and application perspectives. The fundamental working principles of piezoresistive, capacitive, piezoelectric, and resonant pressure sensing are explained, supported by the relevant mathematical formulations. Different sensor types are compared in terms of sensitivity, power consumption, cost, temperature stability, and typical application domains. The paper then surveys major application areas including automotive systems, aerospace instrumentation, medical devices, consumer electronics, and the Internet of Things (IoT). Key fabrication technologies such as photolithography, deposition, etching, bulk and surface micromachining are reviewed, along with packaging and calibration challenges. Finally, emerging trends are discussed, including smart MEMS sensors with on-chip processing, flexible and wearable devices, integration of nanomaterials, energy harvesting for self-powered operation, and the convergence with artificial intelligence. The review concludes that MEMS pressure sensors have transformed modern sensing through miniaturization, high accuracy, low power consumption, and mass production capability, and they will continue to enable new applications in the future.

کلیدواژه ها:

MEMS pressure sensors ، micro electromechanics ، piezoresistive Effect ، capacitive ، microfabrication ، Aviation ، smart sensors