Effect of Thermal Treatment on Vanadium Oxide Thin Films

In the present work, vanadium oxide thin films are prepared by one of the deposition methods such as magnetron sputtering, by one of the chemical reduction methods in vanadium pentoxide films, reactive sputtering deposition from a pure vanadium target (۹۹.۹۹%) in Ar gas mixture. The crystallinity, morphology, chemical content and structural vibrational properties are studied with the help of X-ray diffractometry, FF-SEM and EDX Raman scattering, UV-Vis near infrared Spectroscopy respectively

کلیدواژه ها:

Smart materials ، Vanadium (IV) Oxide ، Magnetron sputtering