CMOS Magnetic Sensor with MAGFET

Split drain MAGFET is a special kind of MOSFET that can be used as a Hall sensor to measure magnetic fields. The sensitivity of a MAGFET depends on geometric parametersand bias conditions. In this paper several different structures of MAGFET including rectangular and sectoral shapes in two andfour lobes, each with different sizing have been designed and fabricated in a standard CMOS technology. The measurement results on different samples show that among all the shapes, the sectoral structure with two lobes has the most sensitivity with respect to the magnetic field