Investigating the influence of piezoelectric excitation on the veering phenomenon associatedwith electrostatically coupled micro-beams

This paper aims to introduce an alternative approach forbalancing mode-localized beam-type resonant massmicro-sensors via equipping the system with piezoelectriclayers. To this end, employing the Hamilton principletogether with the Ritz method, the non-linear reducedequations of motion governing electrostatically coupledmicro-beams with piezoelectric layers are obtained.Doing so, the reduced equilibrium equations are thenobtained by neglecting the terms with the timederivatives. In addition, the free vibration equationsassociated with the present system are also extractedthrough linearizing the motion equations around thepreviously determined static configuration of the system.Solving the free vibration equations, the eigenvalue lociof the system are then plotted. Afterward, the influence ofpiezoelectric excitation on the veering phenomenon isstudied. The results, whose accuracy is successfullyvalidated by those available in the literature, reveal thatpiezoelectric excitation can drastically affect the veeringphenomenon. Given this important observation, thepossibility of employing piezoelectric excitation indesigning tunable resonant mass micro-sensors thatoperate based on the mode-localization phenomenonsuggests itself.

کلیدواژه ها:

veering phenomenon ، electrostaticallycoupled micro-beams ، piezoelectric excitation ، tunableresonant mass micro-sensors.