Design and Simulation of a Three-Phase Electrostatic CylindricalRotary Micromotor

Nowadays the electrostatic motor finds frequent use in micro -electro-mechanical systems (MEMS) where their drive voltages are below ۱۰۰ volts. Using moving charged plates in capacitor motors are far easier to fabricate than coils and iron cores. This paper presents a novel design of a three-phase electrostatic rotary motor. It is shown that angular velocity in an electrostatic motor using cylindrical capacitors in comparison with parallel plate capacitors is improved ۱.۸ magnitude of order for the motor and as the voltage increases the enhancement of slope rate in the angular velocity of the cylindrical type is more tangible compared to the parallel plate type. The effect of changing the gap between rotor and stator on the angular velocity is also studied.

کلیدواژه ها:

Cylindrical capacitors ، Electrostatic ، Micro-motors ، MEMS