Conceptual Design and Finite Element Analysis of Passive Microvalves with the Application in Micropump

In this paper novel membrane micro check valves with new geometries are presented. For this purpose, important and useful models that are presented in the literature are investigated and new models are designed and modeled. The amount of displacements in microvalve s membranes for different applied pressure is computed using COMSOL MultiPhysics software. The performance of all valves are studied and compared with experimental results from the literature. Finally, they are ranked by comparing the amount of displacement of membranes and the ability of microvalves in ferrying the flow.