Preparation and characterization of PZT thin films deposited by sol-gel method on different substrates

Ferroelectric PZT thin films have been extensively investigated because of their excellent piezoelectric, pyroelectric, ferroelectric, and dielectric properties. Sol–gel synthesis and spin-coating are popular routes to the formation of high quality, dense, crack-free thin films. In this work PZT thin films have been prepared by sol-gel method via spin-coating on glass, sapphire, stainless steel, Si, and Pt/Ti/SiO2/Si substrates. The crystallographic and morphological properties of the films have been analyzed by X-ray diffraction, and scanning electron microscopy. The electrical properties of thin films including the permittivity, loss tangent and P-E hysteresis were measured and compared for different substrates. It was concluded that the highly textured PZT provskite phase forms on stainless steel and Pt/Ti/SiO2/Si substrates at moderate annealing temperature.

کلیدواژه ها:

Thin film ، piezoelectric ، PZT ، sol-gel