Study on the dynamic and static pull in instability of a fully clamped micro plate considering self stretching and residual stress effects

In this paper the static and dynamic pull-in instability of a fully clamped miro plate considering the effects of residual stress , and axial stress have been studied.

کلیدواژه ها:

micro plate ، pull-in voltage ، MEMS ، electrostatic actuation ، finite element method