Carbon Nanoparticles by Pulsed Direct Current Plasma Enhanced Chemical Vapor Deposition

Pulsed direct current plasma enhanced chemical vapor deposition was used to deposit carbon nanoparticles at room temperature. Transmission electron microscopy revealed the shapes and sizes of carbon nanoparticles. The minimum size of the nanoparticles was as low as 10 nm. X-ray diffraction did not show peaks of graphite. Raman and Fourier transformed infrared spectroscopy revealed the sp2bonds of the graphite planes in the nanoparticles.

کلیدواژه ها:

carbon ، nanoparticles ، fullerene ، plasma ، deposition