Simulation of electrostatic micro-Tweezers by Using Shaped IDT Finger Comb Drive

Finite element method (FEM) analysis is employed for simulation of electrostatic actuation mechanism formicro-tweezers applications. The coupled multiphysical equations including electrostatic, solid mechanic and arbitraryLagrangian–Eulerian (ALE) are solved for the proposed electrostatic micro-tweezer. It is shown that using shapedinterdigitated (IDT) finger comb drive has stronger electrostatic force for micro-gripping effect. The electric field andmechanical displacement study are investigated here. Based on the results, the teeth shaped IDT fingers are of interestfor actuation mechanisms such as gripping effect.

کلیدواژه ها:

micro-tweezers ، interdigitated electrodes ، FEM ، electrostatic force