Size Effect on the Deflection and Resonant Frequency of the Timoshenko Microbeam

Microbeams are components used in the manufacture of microelectromechanical systems (MEMS). Epoxy microbeams have found various applications in microactuators and microsensors. This study aims to use the finite element method for the static and dynamic analysis of the Timoshenko microbeam. To this end, upon applying the initial and boundary conditions governing the studied microbeams, the effects of size on the deflection and natural frequency RI WKH EHDPV ZHUH HYDOXDWHG DW GLIIHUHQW 3RLVVRQʼV UDWLRV. ,W ZDV REVHUYHG WKDW EHDP GHIOHFWLRQ DQd resonance frequency decreased with increasing the microbeam thickness. A good agreement was observed between the results obtained from this study and those obtained using the couple stress theory, the classical theory, and the strain gradient elasticity theory.

کلیدواژه ها:

micro-electro-mechanical systems (MEMS) ، microbeam ، size effect ، finite element method ، modeling