Improve the reliability and Increased lifetime of Comb Drive structure in RF MEMS Switch

This paper presents a novel electrostatic comb-drive RF MEMS switches for the purpose of increasing reliability of micro-electromechanical switches, some new designs analyzed for elimination of adhesion, friction and dielectric charging in non-contact switches, targeted to decrease electrostatic force and applied voltage in the comb driven structure. The reason of this choice is simple manufacturing process (1 or 3 masking) compared to the other MEMS structures, ability to build with more material, linear functioning without static spring fingers, wide applications in addition to switches, such as Resonators, micro-filters, gyroscopes, accelerometers etc.

کلیدواژه ها:

RF MEMS ، Reliability ، Life Time ، MEMS Switch ، Comb Drive