A Novel RF-MEMS Tunable Narrow Band LC Filter for Mobile and Radio Navigation Applications in UHF Band

This paper presents the design, simulation and characterization of an integrated Radio Frequency microelectromichanical system (RF-MEMS) continuously tunable LC filter at 2.5 GHz to 3 GHz UHF band with a 3dB-bandwidth of 83 MHz, insertion loss of -2.8 dB and return loss of -17.58dB up to -21.43dB. This filter is designed by a standard Multi Project wafer which is based on design rules of (MetalMUMPs) fabrication. The proposed tunable LC filter consists of a tunable capacitor and four inductors. The novelties of this RF-MEMS circuit are the integration of mechanical springs or suspensions and electrical inductors, and the integration of electrostatically actuator and electrical capacitor. On the other hand, in the same time capacitor of circuit plays actuator role and the inductors of circuit play springs and suspensions role to hold system on anchors. Because of electrostatic actuator, the power consumption is near zero. The required actuation voltage for drive is 64.25 V. the filter transition time for 2

کلیدواژه ها:

Micromachining ، passive filters ، RF microelectromichanical systems (MEMS) ، tunable bandpass filters ، tunable LC filters ، tunable comb-drive capacitors ، radio frequency ، UHF band