RF- Micro Electromechanical System Switch with High Speed and Low Actuated Voltage

This paper presents a novel RF MEMS (Micro Electromechanical System) fixed-fixed switch for veryfast switching. Using the obtained equations, the switching time depends on the stiffness and effectivemass of the switch beam so that the switching time will be decreased by higher stiffness (springconstant) and lower effective mass. In new design, the suspension bridge is a three-layer beam so thatthe middle layer is aluminum and outer layers are alumina. The reduced dimensions and three layers ofbeam cause to increase stiffness and reduce the mass of the beam. This led to increase the resonancefrequency and as result, the switching time is reduced. The results show that, the switching time is 127ns for the applied voltage of 27v and also the pull-in voltage is 18V. The return loss is 12 dB atfrequency of 60 GHz that is desirable and the achieved results is better than the previous works. Thus,this switch is suitable for high frequency applications.