Simulation and Analysis different Mems Pressure Sensor uses Comsol Multiphysics ۵.۲

The MEMS different pressure sensor has been introduced and presented.The types of pressure sensor and its theory of operation are also included.The most interesting features of Mems capacitive pressure sensorsrelated to low power consumption, high sensitivity and immutabilitytemperature effects. Few models of pressure sensors have been simulatedand the results are presented. Simulation results show how thecapacitance varies with increase pressure and diaphragm defermationunder pressure. The design, modelling and simulation of pressure sensorshave been done using Comsol/Multphysics ۵.۲

کلیدواژه ها:

Mems ، Pressure ، Capacitive & Resister ، Pizo ، Sensor