A study of piezoelectric properties of ZnO, AlN and PZT for sensing and actuating in MEMS devices

This paper reports three different piezoelectric materials, ZnO, AlN and PZT, which are used widely in MEMS as sensors and actuators. The electrical and mechanical properties of each are also reported. The prestige equation used for estimating peak output voltage with piezoelectric materials demonstrated the generated voltage by ZnO is 41.21 % larger than AlN voltage. PZT is able to generate quit high peak output voltage (97.21%) in comparing with ZnO and AlN due to the large electromechanical coupling. Also, the stable temperature response of PZT is also presented. Based on this analysis during this study one could conclude that PZT is the superior material and is the best option for actuating and sensing aims with high energy conversion efficiency.

کلیدواژه ها:

Piezoelectric ، Electromechanical coupling ، Sensors ، Actuators ، MEMS