Atomic Force Microscope: Real Time Modeling, Control andSimulation

This paper develops a model and nonlinear control scheme for an atomic force microscope system and analyzes AFM real time behavior. For this reason first, the micro cantilever is modeled by the interaction between sample and cantilever with the Van der Waals attraction/repulsion force. Then a backstepping control algorithm is developed to achieve asymptotic cantilever tip tracking for bounded tip trajectories. Simulation results obtained confirm the effectiveness and validity of the proposed controller

کلیدواژه ها:

AFM ، Backstepping Controller ، Cantilever.