Mechanical Behavior of a Rectangular Micro Plate with Hydrostatic and Electrostatic Pressures Actuation

Rectangular microplates are used in the many Microelectromechanical devices such as micropumps and micropressure sensors. All such systems exhibit a static instability phenomenon (Divergence) which is known as the ‘‘pull-in’’ instability. In this paper, mechanical behaviour of a rectangular micro plate actuated by uniform hydrostatic and non uniform electrostatic pressures, has been studied. A distributed model has been used to investigate pull-in phenomena. The derived nonlinear differential equation has been linearized by step-by-step linearization method, and then the obtained linear equation has been solved using finite difference method. The obtained results for only hydrostatic pressure actuation show that the micro plate is stable and with increasing the hydrostatic pressure the static instability doesn’t occur. But when the electrostatic and hydrostatic pressures are applied together, the divergence instability can be expected and the pull-in voltage or pull-in pressure can be identified.

کلیدواژه ها:

micro plate ، pull-in phenomena ، electrostatic and hydrostatic actuation ، step by step linearization method