The Effect of Fluid Flow in Laminar Boundary Layer on Divergence Instability of a Rectangular Microplate Subjected to Nonuniform Electrostatic Pressure

In this paper the effect of fluid flow in laminar boundary layer on divergence instability (pull-in instability) of a rectangular microplate subjected to nonuniform electrostatic pressure is presented. The problem is defined by the nonlinear elasto-electrostatic equation with the given nonuniform fluid and electrostatic pressures. In order to linearize the governing equation, step-by-step linearization method (SSLM) is used. The linearized equation is then solved using a finite difference method. The method uses SOR by lines technique which is known as one of the most efficient block-iterative procedures and is ideally suited, but not limited, to the case of our study. In case that the plate is loaded by only the uniform fluid pressure, the numerical results are compared with those of Levy’s analytical solution and good agreement is observed. The results show that the fluid flow in laminar boundary layer plays a significant role in bringing down the pull-in voltage of the plate

کلیدواژه ها:

wall shear stress ، MEMS ، pull-in ، SOR