A novel miniature field emission pressure sensor: Applying CNTs as the cathode and graphene as the sensitive membrane

For the first time,we have fabricated a field emission pressure sensorbased on CNTs, while using grapheneas the sensitive membrane. The proposed sensor can serve as a highly sensitive pressure sensor which meosures thepressure value and direction. In this structure, CNTs have been grown inside the micro- hoies, etched in siliconsubstrate, then graphene sheets have been dispersed on the hole array. We have investigated the outputcharacteristics of the fabricated sensor which shows a sensitivity of about 2 μA/KPa.

کلیدواژه ها:

Graphene ، CNT ، Field emission ، Pressure sensor