he Role of Hydrogen in Growth of Graphene Like Thin Film

The effect of the H2 for graphene like thin film growth by LPCVD (low-pressure chemical vapor deposition)on copper substrate was investigated. The graphene synthesized were characterized using Raman spectroscopy and fieldemission scanning electron microscopy (FESEM) .We show that the methane-to-hydrogen ratio is critical parameter thataffect the structural perfection of graphene like domains. The Raman studies confirm graphene like carbon nature due tothe appearance of significant G and 2D peaks. Also the 2D peak intensity increases by increasing the H2 concentration ingas mixture, indicating a low graphene layers. The resulting domain size (the nucleation density) is maximum atmaximum value of H2 concentration.

کلیدواژه ها:

graphene like thin film ، low-pressure chemical vapor deposition ، Raman