Study on pull-in instability phenomenon in MicroElectroMechanical Systems (MEMS)

MicroElectroMechanical Systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry. There is an increasing demand of devices having extremely high performance at low power consumption and compact size in various satellites, medical, and communication systems. This paper is devoted to providing the static and dynamic pull-in instability phenomenon in MEMS. Exact solution of pull-in voltage/position is very crucial in the design of electrically actuated microstructures. In this regard, the equations of static and dynamic pull-in behavior are derived using Hamilton’s principle. It can be seen that the pull-in instability phenomenon can affect on the performance of the MEMS. In addition, the literature could be extended in the future to conduct experiments for a wide range of data to confirm the evaluation about pull-in voltage and to consider various shapes and devices of MEMS/NEMS as well.

کلیدواژه ها:

MicroElectroMechanical Systems (MEMS) ، Pull-in instability ، Pull-in voltage ، Applied voltage ، Electrostatic actuation