Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for CapacitiveAcoustic Sensors

سال انتشار: 1393
نوع سند: مقاله ژورنالی
زبان: انگلیسی
مشاهده: 493

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شناسه ملی سند علمی:

JR_IJE-27-12_007

تاریخ نمایه سازی: 13 مرداد 1394

چکیده مقاله:

In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has beenpresented. First, an analytical analyzes has been carried out to derive mathematic expressions formechanical sensitivity of diaphragm with residual stress. Next, by using Rayleigh's method we presentmathematical model to calculate the resonance frequency of corrugated diaphragm and investigate theeffect of residual stress, Young modulus and corrugation numbers on resonance frequency ofdiaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool forfinite element simulation have been used. The analytical and simulated results have been comparedtogether and there is good agreement between them.

کلیدواژه ها:

Resonance FrequencyCorrugated DiaphragmMechanical SensitivityResidual Stress

نویسندگان

B Azizollah Ganji

Electrical & Computer Engineering Department, Babol University of Technology, Babol, Iran

M Taybi

Electrical & Computer Engineering Department, Babol University of Technology, Babol, Iran