Analysis & Modeling of Film Bulk Acoustic Resonator(FBAR) Mass Sensor

FBAR (Film bulk acoustic resonator) as one of the most famous piezoelectric resonator has been investigated for last decade in telecommunication systems for their small size and power consumptions. More than RF(Radio Frequency) applications, FBARs can be used as sensor. For instance , when a FBAR device is put under mechanical pressure its resonance frequency will shift. This sensor is fabricated by standard MEMS processes like back-etch, RF sputtering and deposition different material via furnaces. FBAR’s are featured with self-actuating and self-detecting abilities and prepare them to use in many Industrial, chemical and biological applications.There is some electrical circuits model like BVD & MBVD that use for parametr extractions of device. In this paper we will discuss about them and the mass sensitivity of FBAR as one of the most sensitive sensors at different enviroments like air and other fluides with high Q factor and analysis its fundamental mechanisms.finally some different applications of such a sensor will be explained

کلیدواژه ها:

Piezoeclectric ، Resonator ، FBAR ، SAW ، BAW ، Mass sensor