Controlling the Pull-In Voltage and the Switching Time of MEMS Electrostatic Switches by Piezoelectric Layers

In this paper, a novel method has been developed to control the pull-in voltage and the switching time by using of the piezoelectric layers that have been located on the upper and lower surfaces of switch. In the developed model, the tensile or compressive residual stresses effect in the Fixed-Fixed end type MEMS switches have been considered. The nonlinear governing differential equation of the Fixed-Fixed end type MEMS switch has been derived by considering the piezoelectric layers and residual stresses. The results show that by different applied voltage to the piezoelectric layers, the pull-in voltage and the switching time can be controlled.