Study of the Dynamic Behavior of the Silicon Nanoresonators Using Molecular Dynamics Simulations

Currently micro and nanobeams are widely used in biotechnology, nano scale actuators, and electronic circuits, i.e. AFM, MEMS and NEMS. Due to valuable properties of these devices such as high frequency, minimum energy consumption, ultra-small size, and high accuracy, they have increased the rate of progress in nanotechnology. Understanding the dynamic behavior of these instruments is essential for the design of the desirable devices. This paper aims to investigate the size dependence of the resonant frequency using molecular dynamics simulations. Conventional continuum theory does not account for contributions from length scale effects which are important in modelling of nanobeams. Failure to include size-dependent contributions can lead to underestimates of deflection, stresses, and pull-in voltage of electrostatic actuated micro and nanobeams. This research aims to use the molecular dynamics simulations to study the dynamic behavior of nanobeams. The precise model we will use for modeling nanobeams employs an atomistic description of several atoms to predict the effect of size on the natural frequency and dynamic response of silicon nanoresonators. The results indicate that the dynamic behavior of silicon nanoresonators is completely different from the macroscopic beams. These results demonstrate that the classic theory may fail to analyze the performance of nanostructures.

کلیدواژه ها:

nanoresonator ، size effect ، NEMS ، natural frequency ، molecular dynamic