Modeling & Simulation for a Novel Kind of Capacitive Pressure Sensor

This paper proposes a kind of MEMS1 system for overcome pressure blood in pharma clancy patients and advice for using capacitive pressure sensor for sensing blood pressure. This kind of senor is high sensitivity and covers a large range of pressure. At first we try to modeled sensor and then simulated in our situation. After that we can discussed about the result of simulation for choosing suitable pressure sensor for our condition.

کلیدواژه ها:

Micro sensor ، Pressure sensor ، high sensitivity ، Capacitive Pressure Sensor