Thermodynamical Stability and Deposition of High-entropy MoNbTaTiZr Coating from a Composite Target

Biocompatible high-entropy alloys (HEAs), such as the Mo-Nb-Ta-Ti-Zr system, are promising materials for medical implant applications. While the properties of bulk materials of these alloys have been extensively studied, their applications as coatings remain a prospective area of investigation. Achieving a specific stoichiometry, which is critical for these alloys, can be accomplished by magnetron sputtering method using a segmented target. In this study, the mixing entropy (∆Smix), mixing enthalpy (, atomic size difference , and valence electron concentration (VEC) were calculated to evaluate the alloy's stability. An empirical equation was employed to calculate the sputtering yields of Mo, Nb, Ta, Ti, and Zr. The theoretical results were compared with experimental data. Based on these findings, a segmented target was fabricated and utilized to deposit a MoNbTaTiZr high-entropy alloy coating.

کلیدواژه ها:

High-entropy alloy ، Magnetron sputtering ، coating ، Biocompatibility