Two-dimensional relief metal forming for the fabrication of micron-scale patterns on flat substrates

This paper introduces a comprehensive metal microforming system based on ۲D relief printing, designed to address the limitations of conventional microelectromechanical systems (MEMS) fabrication methods. Suspending thin wires in thermal flow sensors enhances measurement accuracy due to the low thermal conductivity of air, while semicircular microfluidic channels improve fluidic performance by reducing turbulent flow. Conventional techniques such as photolithography and hot embossing face challenges in fabricating suspended structures, semicircular microchannels, and in processing low-cost, rigid substrates.The proposed integrated system, comprising mechanical and electronic subsystems and a dedicated nozzle, is controlled using optimized G-code commands and enables direct printing of resistive and capacitive sensors with significantly reduced fabrication steps. Experimental results demonstrate successful printing of linear patterns and suspended electrodes with diameters ranging from ۱۰ to ۱۰۰ µm on plastic and glass substrates.

کلیدواژه ها:

Microfluidics ، Flowmeter ، Metal Microforming ، Photolithography ، Microelectromechanical Systems (MEMS)