Synthesis of Zinc Oxide Nanostructured Thin Film by Sol-gel Method and Evaluation of Gas Sensing Properties

Ethanol sensitivity of zinc oxide (ZnO) thin film has been studied in present work. Semiconductor thin films of zinc oxide (ZnO) were deposited onto soda lime glass substrates by the sol–gel method anddip-coating technique. The ZnO sol was synthesized by dissolving zinc acetate, Zn (CH3COO)2.2H2Oin ethanol, and then adding triethanolamin (TEA). The as-coated films were preheated at 150 ºC for 10 min and annealed at 500 ºC for 1 h in air ambiance. Zinc oxide thin films were analyzed by field emission scanning electron microscopy (FE- SEM) and X- ray diffraction (XRD). In addition, Gassensitivity of the zinc oxide thin film was determined by electrical sheet resistance measurements. The sensitivity to ethanol was remarkable and response and recovery time were only 8 sec, and 4 sec, respectively

کلیدواژه ها:

ZnO ، Thin Film ، Nanostructure ، Sol Gel ، Gas Sensor