Design and Simulation of MEMS Based Parametric Amplifier

This paper presents the theory, design and simulation of MElulSt based parantetric ampliJiershtpconverslersu. sing the lvlutilPS' process, the nonlinear reaclance has been replaced with IUIEMS variable capacitor. An equivalent circuit model of the MEIIIS has been extracted through electromagnetic simulation resuhs The device has been stinmlated by a large pump signal at the frequency oJ' 51 5 kH: A complete lctrge signal analysis of the IilEMS has been made and an analytical nonlinear electrontechanicaml odel has been det,eloped.A complete set of ecy,mtionsJ br input and output matching circuits and gain calculation hcs been worked out. A design exantple with 100 kHz inpil 615 kH: olttpltt signal has been simulated and ils electrical characteristic such as gain, outpttt spectrum, inptrt impedance and gain stability are completely studied. The advantage of this technique is that it could antpltfu sensors ontput signals u,ithout any CfuIOS electrontcs Sonte special appliccttions include very high temperalure ampli/iers and high particle bontbardmenAt s parantetrice lfectc ircuit doesn o! sttlfer Jiom shot noise or l/f noise, can be introduceda s an ultra loy, noise citcuit

کلیدواژه ها:

MEMS ، variable capactior ، LNA ، parametric effect amplifier