Fabrication Feasibility of SU۸ Waveguides and Gold Electrodes via Lift-Off based Micromachining Process

Brain interfaces are advanced systems designed to combine optical waveguides for neural stimulation with electrodes for recording neural activity. So, microfabrication process for developing such compact devices is challenging and critical to their performance and application. However, conventional fabrication techniques often involve stacking layers of different substrates for each of stimulation and recording parts, resulting in bulky designs that increase the risk of invasive properties. This issue makes the implants less pragmatic in neuroscience studies. This research assesses a simple method for the assembly of SU۸ waveguides with Au electrodes on a single substrate. It utilizes lift-off technique to fabricate electrodes simply onto the waveguide, routing down to the same primary substrate. In fact, the method introduced eliminates the need for depositing additional layers as a base for the electrode formation. The results demonstrate successful feasibility and assembly of the structure, without relying on a common stacked and thick configuration.

کلیدواژه ها:

Microfabrication ، Lift-off ، Photolithography ، UV exposure ، Deposition ، SU۸