Characterization of Nanosized Al۲O۳ Powder Synthesized by Thermal-Assisted MOCVD and Plasma-Assisted MOCVD

Nanosized Al۲O۳ powder is synthesized by thermal Metal Organic Chemical Vapor Deposition (MOCVD)combined withplasma. The effects of reaction temperature, pressure, Al(CH۳)۳ (TMA) concentration and reactant gases (CO۲ and O۲) on the characteristics of the synthesized Al۲O۳ powders are investigated. The experimental results demonstrate that very fineAl۲O۳ powders with mean particle size of about ۲.۵ nm can be obtained at ۵.۳kPareactor pressure and ۱۰۰۰ oCby the thermal MOCVD. As the pressure is increased from ۵.۳kPa to ۱۰۰ kPa, the mean diameter of Al۲O۳ powders also reaches to ۱۰ nm. In other words, the increase in pressure has a negative effect on the synthesis of nanosized Al۲O۳. Meanwhile, it is also observed that the increment of temperature can promote the synthesis of fine Al۲O۳ powder.

کلیدواژه ها:

Nanosized ، Al۲O۳ ، Thermal MOCVD ، Plasma